Custom Systems

One size doesn’t fit all. We understand that and pride ourselves on working consultatively with our customers to find and implement the solution that is right for their thin film needs.

Our line-up of ALD solutions includes systems designed for research and production applications. We have customized reactors, such as our dome lid, available on all Savannah systems to accommodate stacks of substrates in the reaction chamber. In addition we have designed and built several customer chambers, such as chambers capable of holding Gen 2 flat panel substrates or cylindrical reactors designed to accommodate substrates with unique shapes.

We have also customized systems to integrate with other process chambers such as PVD deposition systems. We also have customized the front end of the systems to integrate them with glove boxes for applications in which cleanliness was a key concern. We have also implemented load locks and other wafer handling equipment to the front end of our systems.

So, no matter what your application, the ALD experts at Cambridge Nanotech can work with you to implement a customized solution to your ALD challenges.