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Cambridge NanoTech Atomic Layer Deposition Systems - Sitemap

Cambridge NanoTech Atomic Layer Deposition ALD Systems home page

Atomic Layer Deposition subpages:

• Tutorial in Atomic Layer Deposition (ALD) by Cambridge NanoTech
• Animation of Atomic Layer Deposition process
• Atomic Layer Deposition materials
• Switching to Atomic Layer Deposition Systems
• Applications of ALD Atomic Layer Deposition in manufacturing

ALD - Semiconductors & Nanotechnology:

• ALD - Semiconductors & Nanotechnology - gate dielectrics
• ALD - Semiconductors & Nanotechnology - gate electrodes
• ALD - Semiconductors & Nanotechnology - metal interconnects
• ALD - Semiconductors & Nanotechnology - diffusion barriers
• ALD - Semiconductors & Nanotechnology - DRAM
• ALD - Semiconductors & Nanotechnology - multilayer capacitors
• ALD - Semiconductors & Nanotechnology - read heads

Atomic Layer Deposition - Optical applications:

• ALD - Optical applications - antireflection
• ALD - Optical applications - optical filters
• ALD - Optical applications - OLED passivation
• ALD - Optical applications - photonic crystals
• ALD - Optical applications - transparent conductors
• ALD - Optical applications - electroluminescence
• ALD - Optical applications - solar cells
• ALD - Optical applications - lasers
• ALD - Optical applications - integrated optics
• ALD - Optical applications - UV blocking
• ALD - Optical applications - colored coatings

Atomic Layer Deposition in Micro-electromechanical systems (MEMS):

• ALD - MEMS - Micro Electromechanical Systems
• ALD - MEMS - etch resistance
• ALD - MEMS - hydrophobic

Atomic Layer Deposition in Wear Resistant applications:

• ALD - Wear Resistant - blade edges
• ALD - Wear Resistant - molds and dies
• ALD - Wear Resistant - solid lubricants
• ALD - Wear Resistant - anti corrosion

Atomic Layer Deposition in Nanostructures:

• ALD - Nanostructures - inside pores
• ALD - Nanostructures - nanotubes and nanowires
• ALD - Nanostructures - around particles
• ALD - Nanostructures - atomic force microscopes AFM tips

Atomic Layer Deposition systems in Catalytic applications:

• ALD - Catalytic - chemicals
• ALD - Catalytic - catalytic converters
• ALD - Catalytic - fuel cells

Other applications of Atomic Layer Deposition:

• ALD - Other Applications - roll-to-roll ALD coating systems
• ALD - Other Applications - internal tube liners
• ALD - Other Applications - nano glue
• ALD - Other Applications - biocompatible
• ALD - Other Applications - magnetic materials



• Advantages of Atomic Layer Deposition over Sputtering, Evaporation, Electrodeposition, CVD
• Switch to ALD Systems from Sputtering, Evaporation, Electrodeposition, CVD

Cambridge NanoTech Atomic Layer Deposition - Products subpages

• Cambridge NanoTech ALD Products - Savannah ALD systems
• Cambridge NanoTech ALD Products - Take Control
• Cambridge NanoTech ALD Products - Custom Design
• Cambridge NanoTech ALD Products - Other Products
• Cambridge NanoTech ALD Products - Request a quote
• Cambridge NanoTech ALD Products - Certification
• Top Reasons for choosing Cambridge NanoTech ALD Systems
• Cambridge ALD Customer Testimonials
• Request a Quote for ALD Systems prices

Cambridge NanoTech Atomic Layer Deposition Systems - Services subpages:

• CNT Atomic Layer Deposition - Services - coatings
• CNT Atomic Layer Deposition - Services - nanotechnology consulting
• CNT Atomic Layer Deposition - Services - research collaborations

Cambridge NanoTech ALD Systems - Science subpages:

• CNT Atomic Layer Deposition - Science - Client Map
• CNT Atomic Layer Deposition - Science - search scientific abstracts
• CNT Atomic Layer Deposition - Science - books on nanotechnology
• CNT Atomic Layer Deposition - Science - ALD theses

Contact Cambridge NanoTech

• CNT Atomic Layer Deposition - Contact Us
• CNT Atomic Layer Deposition - International distributors
• CNT Atomic Layer Deposition - top reasons for buying Cambridge NanoTech ALD

Cambridge NanoTech Media subpages:

• CNT Atomic Layer Deposition - Media - News
• CNT Atomic Layer Deposition - Media - FAQs
• CNT Atomic Layer Deposition - Media - Glossary
• CNT Atomic Layer Deposition - Media - Press Releases
• CNT Atomic Layer Deposition - Media - Sitemap

Cambridge NanoTech Search Page:

• Cambridge NanoTech's own search facility

Atomic Layer Deposition Documents in pdf format:

• Advanced electronic and optoelectronic materials by Atomic Layer Deposition: - An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials.
• Advanced Processes for MEMS-based Displays
• Air Liquide Ru precursor - CHORUS
• Alloy catalysts designed from first principles
• Atomic Layer Deposition of Ultrathin Copper Metal from a Liquid Copper(I) Amidinate Precursor
• Atomic Layer Deposition Tutorial by Cambridge NanoTech
• Atomic Layer Deposition by Ritala & Leskelä, University of Helsinki
• Atomic Layer Deposition of Noble Metal Thin Films
• Atomic layer deposition of thin films of ZnSe-structural and optical characterization
• ALD MATERIALS AND APPLICATIONS
• Atomic layer deposition of ZnO on ultralow-density nanoporous silica aerogel monoliths
• Blue- and green-emitting SrS:Cu electroluminescent devices deposited by the atomic layer deposition technique
• Buffer layers in Cu(In,Ga)Se2 solar cells and modules
• Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers
• Characteristics of Organic Light Emitting Diodes with Al-Doped ZnO Anode Deposited by Atomic Layer Deposition
• ChemFiles: Volatile Precursors for Nanofabrication
• Complex Nanostructures by Atomic Layer Deposition
• Controlled Replication of Butterfly Wings for Achieving Tunable Photonic Properties
• Conformal hydrophobic coatings - prepared using atomic layer deposition seed layers and non-chlorinated hydrophobic precursors
• CSA-CE-Safety-certificates
• Diffusion barrier properties of tungsten nitride films grown by atomic layer deposition from bis(tert-butylimido)bis(dimethylamido)tungsten and ammonia
• Evolution of materials technology for stacked-capacitors in 65 nm embedded-DRAM
• Extra Low-temperature SiO2 Deposition Using Aminosilanes
• Growth, structure, and tribological behavior of atomic layer-deposited tungsten disulphide solid lubricant coatings with applications to MEMS
• High-performance ZnO thin-film transistors on gate dielectrics grown by atomic layer deposition
• High-performance optical retarders based on all-dielectric immersion nanogratings
• High-K dielectrics for advanced carbon-nanotube transistors and logic gates
• Introducing atomic layer epitaxy for the deposition of optical thin films
• Inductively coupled plasma etching of amorphous Al2O3 and TiO2 mask layers grown by atomic layer deposition
• Local Gating of Carbon Nanotubes
• Low-temperature atomic-layer-deposition lift-off method for microelectronic and nanoelectronic applications
• Monocrystalline spinel nanotube fabrication based on the Kirkendall effect
• Near-surface alloys for hydrogen fuel cell applications
• Novel, uniform nanostructured catalytic membranes
• Novel Cambridge NanoTech foreline trap principle
• Nucleation and Adhesion of ALD Copper on Cobalt Adhesion Layers and Tungsten Nitride Diffusion Barriers
• Optical thin films consisting of nanoscale laminated layers
• Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition
• Preparation by Atomic Layer Deposition and Characterization of Catalyst supports surfaced with Aluminium Nitride
• Progress and opportunities in Atomic Layer Deposition - an overview
• Self-ordered Growth of Alumina Pore Channel Arrays
• Ultraviolet lasing in high-order bands of three-dimensional ZnO photonic crystals
• Ultraviolet ray absorbing coatings on glass for automobiles

Atomic Layer Deposition - Theses:

• Atomic Layer Deposition of TaN, NbN, and MoN Films for Cu Metallizations
• Atomic Layer Deposition of Noble Metal Thin Films
• Atomic Layer Deposition of High-k dielectrics from novel cyclopentadienyl-type precursors
• Atomic Layer Deposition of Lanthanide Oxide Thin Films
• Atomic Layer Deposition of Copper, Copper(I) Oxide and Copper(I) Nitride on Oxide Substrates.

ALD is suitable for many applications in Semiconductors and nanoelectronics including Gate Dielectrics, Gate Electrodes, Diffusion Barriers, and DRAM | Dynamic Random Access Memory. In the optical fields, ALD can be applied to Optical Dielectric Multilayer Structures / Filters, OLED (Organic Light Emitting Diode), Photonic Crystals and static Photonic Band Tuning, Transparent Conductors and Transparent Conducting Electrodes, TFEL or Thin Film Electroluminesence, Solar Cells, OLED Humidity Barrier, Precision Optics Coatings and Photonic Crystal Structures and Lasers. ALD is also applied to MEMS (micro electromechanical systems and Hydrophic & Anti-Stiction Layers in MEMS Devices. There are also applications of ALD in wear resistence, in coatings for blade edges and Nanocomposite Tungsten Disulphide solid lubricants. ALD is also used in nanostructures such as nanotubes & nanowires, and Atomic Force Microscope (AFM) tips. Other common applications of ALD are Catalysis & Catalyst Supports, Solid Oxide Fuel Cell Electrodes, Nano Glue, Biocompatible Coatings for medical instruments Ferromagnetic Transition Metals & Nanotubes and Internal Tube Liners and Inert Inner Linings.