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MAGNETIC MATERIALS

In 2003, the group of Prof. Gordon demonstrated how ferromagnetic transition metals could be deposited. For this deposition, they used new metal acetamidinates precursors.

In 2006, using Nickelocene, Cobaltocene, H2O and O3, ferromagnetic nanotubes were grown successfully by one of our customers using a Savannah ALD system. The deposited ferromagnetic materials in the pores of anodic alumina. The ferromagnetic Ni and Co nanotubes with diameters ranging from 35 to 60 nm exhibited a preferential magnetisation direction along the nanowire axis.

Another interesting field of magnetic applications, is the quest for room temperature ferromagnetic semiconductors, such as in unexpected magnetism in a dielectric oxide. Since metal oxides such as HfO2 can easily be grown in a well controlled fashion, ALD might be a promising way to approach this field.

ALD is suitable for many applications in Semiconductors and nanoelectronics including Gate Dielectrics, Gate Electrodes, Diffusion Barriers, and DRAM | Dynamic Random Access Memory. In the optical fields, ALD can be applied to Optical Dielectric Multilayer Structures / Filters, OLED (Organic Light Emitting Diode), Photonic Crystals and static Photonic Band Tuning, Transparent Conductors and Transparent Conducting Electrodes, TFEL or Thin Film Electroluminesence, Solar Cells, OLED Humidity Barrier, Precision Optics Coatings and Photonic Crystal Structures and Lasers. ALD is also applied to MEMS (micro electromechanical systems and Hydrophic & Anti-Stiction Layers in MEMS Devices. There are also applications of ALD in wear resistence, in coatings for blade edges and Nanocomposite Tungsten Disulphide solid lubricants. ALD is also used in nanostructures such as nanotubes & nanowires, and Atomic Force Microscope (AFM) tips. Other common applications of ALD are Catalysis & Catalyst Supports, Solid Oxide Fuel Cell Electrodes, Nano Glue, Biocompatible Coatings for medical instruments Ferromagnetic Transition Metals & Nanotubes and Internal Tube Liners and Inert Inner Linings.