LASERS
In an example of a
laser made by ALD, polystyrene opal templates are
deposited by self-assembly onto glass substrates, infiltrated
with ZnO by ALD, and removed by firing at elevated temperatures. The resulting
photonic crystal structures
are face-centered cubic arrays of air spheres surrounded
by ALD-ZnO dielectric shells with a thickness of typically
50 layers. UV lasing is demonstrated at room temperature. The
photonic crystals are inverse opals with high refractive index contrast that simultaneously confine
light and provide optical gain. Highly directional lasing with tunable wavelength is obtained by
optical pumping.