LASERS

In an example of a laser made by ALD, polystyrene opal templates are deposited by self-assembly onto glass substrates, infiltrated with ZnO by ALD, and removed by firing at elevated temperatures. The resulting photonic crystal structures are face-centered cubic arrays of air spheres surrounded by ALD-ZnO dielectric shells with a thickness of typically 50 layers. UV lasing is demonstrated at room temperature. The photonic crystals are inverse opals with high refractive index contrast that simultaneously confine light and provide optical gain. Highly directional lasing with tunable wavelength is obtained by optical pumping.