NANOTUBES, NANOWIRES & GRAPHENE
A classical application for ALD is the deposition of gate dielectrics for devices that do not have native oxides. Carbon nanotubes are a typical example. The groundbreaking work in this field demonstrated complementary p- and n-type carbon nanotube transistors with ZrO2 gates. Complementary NOT gates were made with a voltage gain up to 60.Graphene is another example of a hot new field of research where high quality gate dielectrics are needed for the creation of advanced nano-electronic devices. These recent studies demonstrated quantized transport in graphene p-n junctions in a magnetic field and electronic transport in locally gated graphene nanoconstrictions using Savannah S100 ALD tools.
Coaxial coating of ZnO nanowires with ALD-Al2O3 coatings were transformed into spinel nanotubes using the Kirkendahl effect, by one of our customers.