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      Our Customers:

NORTH AMERICA

1. Air Products and Chemicals Inc.
2. Arradiance Inc.
3. Atomate
4. BOC Gases
5. DuPont
6. General Electric Company
7. General Motors
8. Hewlett-Packard
   
9. HRL Laboratories LLC
10. IBM
11. Kovio Inc.
12. Medtronic Inc.
13. MEMS and Nanotechnology Exchange
14. Nantero
15. Nanomix Inc.
16. NanoOpto Corp.
17. Nanosys Inc.
18. Naval Research Laboratory
19. Northrop Grumman Corporation
20. Palo Alto Research Center
21. PerkinElmer Inc.
22. Pixtronix Inc.
23. Sigma-Aldrich Inc.
24. Solexant Corp.


25. Boston College
26. Boston University
27. Columbia University
28. Cornell University
29. Drexel University
30. Georgia Institute of Technology
    
31. Harvard University
    
32. Massachusetts Institute of Technology
33. North Carolina State University
34. Northwestern University
35. Old Dominion University
36. Pennsylvania State University
37. Princeton University
    
38. Purdue University
39. Rutgers University
40. Stanford University
    
41. Universidad Autonoma de Nuevo Leon, Mexico
42. University of Cincinnati
    
43. University of California, Los Angeles
44. University of California, Riverside
45. University of Illinois, Urbana-Champaign
    
46. University of Kentucky
47. University of Louisville
    
48. University of Maryland
49. University of Minnesota
50. University of North Texas
51. University of Notre Dame
52. University of South Carolina
53. University of Nevada, Las Vegas
54. University of South Florida
55. University of Texas, Austin
56. University of Texas, Dallas
57. University of Texas, San Antonio
58. Virginia Commonwealth University
59. University of Waterloo
60. University of Wisconsin


EUROPE
61. CEA Grenoble, France
62. Centro Nacional de Microelectronica, Spain
63. CSIC Madrid, Spain
64. ETH-Zentrum, Switzerland
65. Hamburg University, Germany
66. IFW Dresden, Germany
67. IMEC, Belgium
68. Forschungszentrum Karlsruhe, Germany
69. INFM National Laboratory, Italy
70. Institute of Physics, Polish Academy of Sciences
71. Lund University, Sweden
72. Max-Planck Institute, Germany
    
73. NCSR Institute of Microelectronics, Greece
74. Technische Universitaet Braunschweig, Germany
75. University of Brescia, Italy
76. University of Liverpool, UK
77. University of Nottingham, UK
78. Thomson R&D, France
79. Varioptic
80. Vienna University of Technology, Austria

ASIA
81. AIST, Japan
82. Data Storage Institute
83. Hitachi, Japan
84. Hokkaido University
85. Institute of Physics, CAS, China
86. Nagoya University, Japan
87. Nara Institute of Science and Technology, Japan
88. National Taiwan University
89. National Technology University, Singapore
90. National University of Singapore
91. Peking University, China
92. RIKEN, Japan
93. Seiko, Japan
94. Tel Aviv University, Israel
95. Tohoku University, Japan
    


OTHER
96. EpiTactix Pty. Ltd., Australia
    

...and many more!

Harvard University

1. Prof. Marcus group owns a Savannah 100 ALD system.

A recent publication submitted to Science by Prof. Marcus shows how NO₂-Al₂O₃ deposited with a Savannah 100 can form a gate dielectric that does not influence graphene electronic properties.

Marcus Group website

Quantum Hall effect in a gate-controlled p-n junction of graphene (published on Science)

2. The Center for Nanoscale Systems at Harvard owns a Savannah 200 ALD system.

CNS website

ALD is suitable for many applications in Semiconductors and nanoelectronics including Gate Dielectrics, Gate Electrodes, Diffusion Barriers, and DRAM | Dynamic Random Access Memory. In the optical fields, ALD can be applied to Optical Dielectric Multilayer Structures / Filters, OLED (Organic Light Emitting Diode), Photonic Crystals and static Photonic Band Tuning, Transparent Conductors and Transparent Conducting Electrodes, TFEL or Thin Film Electroluminesence, Solar Cells, OLED Humidity Barrier, Precision Optics Coatings and Photonic Crystal Structures and Lasers. ALD is also applied to MEMS (micro electromechanical systems and Hydrophic & Anti-Stiction Layers in MEMS Devices. There are also applications of ALD in wear resistence, in coatings for blade edges and Nanocomposite Tungsten Disulphide solid lubricants. ALD is also used in nanostructures such as nanotubes & nanowires, and Atomic Force Microscope (AFM) tips. Other common applications of ALD are Catalysis & Catalyst Supports, Solid Oxide Fuel Cell Electrodes, Nano Glue, Biocompatible Coatings for medical instruments Ferromagnetic Transition Metals & Nanotubes and Internal Tube Liners and Inert Inner Linings.