Home

|

Atomic Layer Deposition

|

Products

|

Services

|

Science

|

Contact Us

|

Media

CATALYSIS

ALD can be used effectively for catalysis in various applications. Usually, catalytic materials are very thin and often on porous substrates, a familiar territory of ALD. This thesis discusses ALD on catalyst supports and reviews some catalytic materials grown with ALD such as CrOx, VOx, Co, Ni, WOx, TiO2, LaOx, YOx, CeO, etc. This thesis discusses ALD of noble metals for a variety of applications, including for catalysis.

Nanostructured catalytic membrane structures have been fabricated by a combination of anodic aluminum oxidation and ALD for use as platforms for the synthesis of highly uniform heterogeneous catalysts. The ALD method makes it possible to control pore diameters on the Angstrom scale even when the overall pore diameter is 10’s to 100’s of nanometers. Vanadia-coated membranes have been tested for the catalytic oxidative dehydrogenation of cyclohexane and show improved selectivity at the same conversion compared to conventional powdered alumina supported vanadia catalysts.

We expect Pt ALD to be a great replacement of conventional noble metal washcoats for automobile catalytic converters and are actively working on this application. Cambridge NanoTech ALD systems can successfully grow the noble metals and metal-oxide catalytic materials, take a look at our search page or consult with us for your specific application.

ALD is suitable for many applications in Semiconductors and nanoelectronics including Gate Dielectrics, Gate Electrodes, Diffusion Barriers, and DRAM | Dynamic Random Access Memory. In the optical fields, ALD can be applied to Optical Dielectric Multilayer Structures / Filters, OLED (Organic Light Emitting Diode), Photonic Crystals and static Photonic Band Tuning, Transparent Conductors and Transparent Conducting Electrodes, TFEL or Thin Film Electroluminesence, Solar Cells, OLED Humidity Barrier, Precision Optics Coatings and Photonic Crystal Structures and Lasers. ALD is also applied to MEMS (micro electromechanical systems and Hydrophic & Anti-Stiction Layers in MEMS Devices. There are also applications of ALD in wear resistence, in coatings for blade edges and Nanocomposite Tungsten Disulphide solid lubricants. ALD is also used in nanostructures such as nanotubes & nanowires, and Atomic Force Microscope (AFM) tips. Other common applications of ALD are Catalysis & Catalyst Supports, Solid Oxide Fuel Cell Electrodes, Nano Glue, Biocompatible Coatings for medical instruments Ferromagnetic Transition Metals & Nanotubes and Internal Tube Liners and Inert Inner Linings.