 |
|||||||||||||
| Home | | | Atomic Layer Deposition | | | Products | | | Services | | | Science | | | Contact Us | | | Media | |
Cambridge NanoTech Inc.
Aspects found only on Cambridge NanoTech ALD systems:
1. Most affordable purchase and smallest foot-print: only with us can you afford multiple systems!
2. Up to 6 heated precursor lines, essential for multi-user or complex in-situ dielectric-metal nanolaminates.
3. Manufactured in a cleanroom under strict ISO 9001:2000, AS 9000 and AS9100 compliance.
4. Fully CE, CSA, FCC, EMC and safety certified by independent testing agencies.
5. All hardware, electronics and software preconfigured and documented for easy customer expansion at any time.
6. The only ALD systems with High Aspect Ratio deposition mode (>1:5000 aspect ratios uniform coating).
7. Only Savannahs have a patented ALD trap that prevents contamination of the pumping line and vacuum pump. No pump replacements necessary with us.
8. Lowest precursor use and shortest cycle times due to small reactor volume, short lines and CAD optimized flow.
9. Easily interchangable domed lids for deposition onto larger objects.
10. A large number of standard recipes for oxides, nitrides and metals readily available.
11. Substrate temperatures now standard up to 500C, optionally to 1000C for epitaxy.
12. Accurate thicknesses down to one atomic layer due to heated high precision pulse valves.
13. Film thicknesses up to micrometers thick, thanks to low precursor use and high speed deposition mode.
Unique Cambridge NanoTech benefits:
14. Free ALD, precursor chemistry and device physics support directly from chemists and physicists.
15. Access to the latest ALD developments at Harvard University
16. Free research grant and proposal assistance.
17. Shortest delivery time, usually from stock.
18. Free demo samples.
19. Most systems implemented world-wide: 85+ ALD systems present at the world's top institutes.
20. Unique collaborations in the Cambridge NanoTech Client Expertise Network to share new recipes and results.
21. Strategic alliance with Sigma-Aldrich for rapid precursor availability, synthesis and support. This alliance
allows our customers to get quick access to prepackaged precursors.
22. Cambridge NanoTech collaborates with their customers on the development of new precursors and recipes
for new materials, by testing them in the Cambridge NanoTech research lab.
1. Most affordable purchase and smallest foot-print: only with us can you afford multiple systems!
2. Up to 6 heated precursor lines, essential for multi-user or complex in-situ dielectric-metal nanolaminates.
3. Manufactured in a cleanroom under strict ISO 9001:2000, AS 9000 and AS9100 compliance.
4. Fully CE, CSA, FCC, EMC and safety certified by independent testing agencies.
5. All hardware, electronics and software preconfigured and documented for easy customer expansion at any time.
6. The only ALD systems with High Aspect Ratio deposition mode (>1:5000 aspect ratios uniform coating).
7. Only Savannahs have a patented ALD trap that prevents contamination of the pumping line and vacuum pump. No pump replacements necessary with us.
8. Lowest precursor use and shortest cycle times due to small reactor volume, short lines and CAD optimized flow.
9. Easily interchangable domed lids for deposition onto larger objects.
10. A large number of standard recipes for oxides, nitrides and metals readily available.
11. Substrate temperatures now standard up to 500C, optionally to 1000C for epitaxy.
12. Accurate thicknesses down to one atomic layer due to heated high precision pulse valves.
13. Film thicknesses up to micrometers thick, thanks to low precursor use and high speed deposition mode.
Unique Cambridge NanoTech benefits:
14. Free ALD, precursor chemistry and device physics support directly from chemists and physicists.
15. Access to the latest ALD developments at Harvard University
16. Free research grant and proposal assistance.
17. Shortest delivery time, usually from stock.
18. Free demo samples.
19. Most systems implemented world-wide: 85+ ALD systems present at the world's top institutes.
20. Unique collaborations in the Cambridge NanoTech Client Expertise Network to share new recipes and results.
21. Strategic alliance with Sigma-Aldrich for rapid precursor availability, synthesis and support. This alliance
allows our customers to get quick access to prepackaged precursors.
22. Cambridge NanoTech collaborates with their customers on the development of new precursors and recipes
for new materials, by testing them in the Cambridge NanoTech research lab.